IBM, Lam Research join forces on sub-1nm logic and High-NA EUV development

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IBM, Lam Research join forces on sub-1nm logic and High-NA EUV development

By Levi Li, DIGITIMES Asia, Taipei
Publication Date: 2026-03-12 04:17:00

Mukesh Khare, IBM Semiconductors GM (left), and Vahid Vahedi, Lam Research chief technology and sustainability officer. Credit: IBM

IBM and Lam Research have announced a five-year collaboration to develop materials, manufacturing processes, and High-NA EUV lithography technologies for sub-1nm logic scaling. The agreement expands a long-standing…

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