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Intel, Imec report on high-NA EUV progress – Bits&Chips

Intel, Imec report on high-NA EUV progress – Bits&Chips

Intel has exposed 30,000 wafers on two installed high-NA EUV scanners, senior principal engineer Steve Carson announced at the SPIE Advanced Lithography Conference, held this week in San Jose. According to conference attendees’ posts on X,…

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https://bits-chips.com/article/intel-imec-report-on-high-na-euv-progress/

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